Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit
نویسندگان
چکیده
منابع مشابه
Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit
A bulk micromachined inertial measurement unit (MIMU) is presented in this paper. Three single-axis accelerometers and three single-axis gyroscopes were simultaneously fabricated on a silicon wafer using a bulk micromachining process; the wafer is smaller than one square centimeter. In particular, a global area optimization method based on the relationship between the sensitivity and layout are...
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ژورنال
عنوان ژورنال: Sensors
سال: 2010
ISSN: 1424-8220
DOI: 10.3390/s100403835